潔凈度級別 | 塵粒大允許數/立方米 | 塵粒最大允許數/2.83升 | ||
≥0.5μm | ≥5μm | ≥0.5μm | ≥5μm | |
100級 | 3,500 | 0 | 10 | 0 |
1000級 | 35,200 | 200 | 100 | 0 |
10,000級 | 350,000 | 2,000 | 1,000 | 6 |
100,000級 | 3,500,000 | 20,000 | 10,000 | 57 |
300,000級 | 10,500,000 | 60,000 | 30,000 | 171 |
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資訊潔凈度級別 | 塵粒大允許數/立方米 | 塵粒最大允許數/2.83升 | ||
≥0.5μm | ≥5μm | ≥0.5μm | ≥5μm | |
100級 | 3,500 | 0 | 10 | 0 |
1000級 | 35,200 | 200 | 100 | 0 |
10,000級 | 350,000 | 2,000 | 1,000 | 6 |
100,000級 | 3,500,000 | 20,000 | 10,000 | 57 |
300,000級 | 10,500,000 | 60,000 | 30,000 | 171 |